ASML Part Number Index

ASML Semiconductor Equipment Spare Parts Reference

ASML part numbers are internal material numbers used by ASML (Advanced Semiconductor Materials Lithography) to identify spare parts installed in ASML lithography and semiconductor manufacturing equipment.

Many ASML spare parts are manufactured by third-party suppliers such as Motorola, Siemens, Fanuc, ABB, and other industrial manufacturers. However, within ASML systems, these components are referenced and managed using ASML-specific part numbers, rather than the original manufacturer’s model number.

This page provides an index of common ASML part numbers we supply, covering control boards, power modules, industrial electronics, and related spare parts. If you cannot find your required ASML part number listed below, please contact us for assistance.

ASML Part Number Categories

By ASML Part Number Series

• 4022.xxxx.xxxx – Control Boards & Electronics

• 4021.xxxx.xxxx – Power Supply & Electrical Modules

• 4030.xxxx.xxxx – Cables, Harnesses & Interconnects

Note: Part number grouping is based on industry experience and common usage in ASML equipment. It does not represent an official ASML classification.

ASML Part Numbers List

Each listed ASML part number links to a corresponding product page with detailed specifications, photos, and availability.

Applications

ASML spare parts listed on this page are commonly used in:

• ASML lithography systems (legacy platforms)

• ASML control cabinets and VME-based subsystems

• Semiconductor wafer fabrication equipment

Compatibility depends on machine configuration and system version. Please confirm before ordering.

Can’t Find Your ASML Part Number?

ASML equipment often uses customized or system-specific material numbers.

If you have:

• An ASML part number

• A BOM reference

• Or a machine / system model

Please contact us with the available information. We support:

• ASML part number matching

• Replacement and alternative suggestions

• Used, refurbished, and surplus ASML spare parts

• Bulk and repeat supply

→ Contact us for quotation and availability

Frequently Asked Questions (FAQ)

What is an ASML part number?

An ASML part number is an internal material number used by ASML to identify spare parts installed in its semiconductor manufacturing equipment.

Is an ASML part number the same as the manufacturer part number?

No. ASML part numbers are different from original manufacturer model numbers. Many ASML parts are produced by third-party suppliers but referenced using ASML-specific numbering.

Do you supply used ASML spare parts?

Yes. We supply used, refurbished, and surplus ASML spare parts depending on availability.

Can you help identify parts using an ASML BOM?

Yes. You may send us an ASML BOM or system reference, and we will assist with part identification and matching.

Disclaimer

ASML is a registered trademark of ASML Holding N.V.
We are an independent supplier and are not affiliated with, authorized by, or endorsed by ASML.